UM positioning workbench series
The UM alignment platform is powered by DXM slotless linear motor/disk DDR, guided by cross roller guide rail and shaft, and equipped with high-resolution grating to achieve XYO three-axis linkage. It is an ideal positioning mechanism for measuring instruments and detection equipment, and can be used for image alignment processing such as semiconductor/liquid crystal related manufacturing equipment and clean environment.
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Direct Drive Motor (integrated)
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Product Description
Overall dimensions
technical parameter
| parameter | UM120-01X01YR-3 | ||
|---|---|---|---|
| X | Y | R | |
| Peak thrust (torque) | 80N | 80N | 2.0 N.m |
| Continuous thrust (torque) | 15N | 15N | 0.4 N.m |
| Maximum transportable mass | 5.9Kg | 5.9Kg | 6.8Kg |
| Effective travel (angle) | 20mm | 20mm | 60° |
| resolving power | 0.1um | 0.1um | 0.36角秒 |
| Maximum speed | 400mm/s | 400mm/s | 400°/s |
| Repetitive positioning accuracy | ±0.5um | ±0.5um | ±0.8角秒 |
Overall dimensions
technical parameter
| parameter | UM200-01X01YR-3 | ||
|---|---|---|---|
| X | Y | R | |
| Peak thrust (torque) | 400N | 400N | 4.0 N.m |
| Continuous thrust (torque) | 70N | 70N | 1.2 N.m |
| Maximum transportable mass | 30Kg | 30Kg | 12.3Kg |
| Effective travel (angle) | 25mm | 25mm | 280° |
| resolving power | 0.1um | 0.1um | 0.25角秒 |
| Maximum speed | 400mm/s | 400mm/s | 270°/s |
| Repetitive positioning accuracy | ±0.5um | ±0.5um | ±0.5角秒 |
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